Exquisite Type:HY45DY20L

Travel Range

20mm

Resolution

0.125μm

Repeatability

＜1μm

Straightness

＜2μm

Parallelism

＜5μm

Pitching

10″（50μrad）

Yawing

10″（50μrad）

Maximum Speed

5mm/sec

Load Capacity

10kg

Weight

1.5kg