Exquisite Type:HY42DY20/25L

Model

HY42DY20/25L

Travel Range

20/25 mm

Resolution

0.125 μm

Repeatability

< 1 µm

Straightness

< 2 µm

Driving Parallelism

< 5 µm

Pitching

10’’ (50µrad)

Yawing

10’’ (50µrad)

Maximum Speed

5mm/sec

Load Capacity

10kg

Weight

1.5kg

Key Features

Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability

Extra-large, high-efficiency linear motor minimizes heat generation

Ironless moving coil has no cogging for ultra smooth velocity control

Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration

High precision glass scale encoder provides accurate position feedback with 50 nm repeatability

Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity

No moving cables inside the stage, reduced particle generation and improved reliability

CONSULTS

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